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The unique ability of slot and sub-wavelength grating (SWG) waveguides toconfine light outside of the waveguide core material has attracted significantinterest in their application to chemical and biological sensing. However, highsensitivity to sidewall roughness induced scattering loss in these structurescompared to strip waveguides casts doubt on their efficacy. In this article, weseek to settle the controversy by quantitatively comparing the sensingperformance of various waveguide geometries through figures of merit that wederive for each mode of sensing. These methods take into account both modalconfinement and roughness scattering loss, the latter of which is computedusing a volume-current (Green's-function) method with a first Bornapproximation. For devices based on the standard 220 nm silicon-on-insulator(SOI) platform whose propagation loss is predominantly limited by randomline-edge sidewall roughness scattering, our model predicts that properlyengineered TM-polarized strip waveguides claim the best performance forrefractometry and absorption spectroscopy, while optimized slot waveguidesdemonstrate >5x performance enhancement over the other waveguide geometries forwaveguide-enhanced Raman spectroscopy.

Are slot and sub-wavelength grating waveguides better than strip waveguides for sensing?