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We present a compact extreme ultraviolet (XUV) source based on high-harmonic generation (HHG) at 2.4 MHz pulse repetition rate driven from the compressed output of a mode-locked thin-disk laser (TDL) oscillator. The system generates very high peak intensities, which enable highly nonlinear frequency conversion reaching VUV/XUV energies. These sources significantly increase the signal-to-noise ratio and reduce measurement durations in many fields such as condensed matter physics. The pulse repetition rate is increased from kilohertz to megahertz with high average photon flux, while keeping the pulse energy sufficiently low to avoid space charge effects. The system uses a semiconductor saturable absorber mirror mode-locked Yb:YAG TDL delivering an average power of up to 70 W with subpicosecond pulses, which are efficiently compressed to sub-100 fs in a simple, single-stage compressor based on a Kagome-type hollow-core photonic crystal fiber. Focusing into a high-pressure xenon gas jet, we generate XUV radiation with up to >5×107  photons/s on the 19th harmonic (23 eV). This HHG system is very compact, has low-noise performance comparable to standard ultrafast low-power laser oscillators, and provides a new tool for the study of attosecond dynamics in condensed matter physics.

Compact extreme ultraviolet source at megahertz pulse repetition rate with a low-noise ultrafast thin-disk laser oscillator