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The displacement of micro-electro-mechanical-systems (MEMS) cantilevers isused to measure a broad variety of phenomena in devices ranging from forcemicroscopes to biochemical sensors to thermal imaging systems. We demonstratethe first direct measurement of a MEMS cantilever displacement with a noisefloor at 40% of the shot noise limit (SNL). By combining multi-spatial-modequantum light sources with a simple differential measurement, we show thatsub-SNL MEMS displacement sensitivity is highly accessible compared to previousefforts that measured the displacement of macroscopic mirrors with verydistinct spatial structures crafted with multiple optical parametric amplifiersand locking loops. These results support a new class of quantum MEMS sensorwith an ultimate signal to noise ratio determined by quantum correlations,enabling ultra-trace sensing, imaging, and microscopy applications in whichsignals were previously obscured by shot noise.

Ultrasensitive measurement of MEMS cantilever displacement sensitivity below the shot noise limit