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Tunable focusing is a desired property in a wide range of optical imaging andsensing technologies but has tended to require bulky components which cannot beintegrated on-chip and have slow actuation speeds. Recently, integration ofmetasurfaces into electrostatic MEMS architectures has shown potential toovercome these challenges, but has offered limited out of plane displacementrange while requiring large voltages. We demonstrate for the first time amovable metasurface lens actuated by integrated thin-film PZT MEMS, which hasthe advantage of offering large displacements at low voltages. An out of planedisplacement of a metasurface in the range of 7.2 um is demonstrated under avoltage application of 23V. This is roughly twice the displacement at a quarterof the voltage of state of the art electrostatic out of plane actuation ofmetasurfaces. Utilizing this tunability we demonstrate a varifocal lens doubletwith a focal shift on the order of 250um at the wavelength 1.55um. Thin-filmPZT MEMS-metasurfaces is a promising platform for miniaturized varifocalcomponents.

MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages