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We present a scheme for on-chip optical transduction of strain anddisplacement of Graphene-based Nano-Electro-Mechanical Systems (NEMS). Adetailed numerical study on the feasibility of three silicon-photonicintegrated circuit configurations is presented: Mach-ZehnderInterferometer(MZI), micro-ring resonator and ring-loaded MZI. An index-sensingbased technique using a Mach-Zehnder Interferometer loaded with a ringresonator with a moderate Q-factor of 2400 can yield a sensitivity of 28fm/sqrt(Hz), and 6.5E-6 %/sqrt(Hz) for displacement and strain respectively.Though any phase sensitive integrated photonic device could be used for opticaltransduction, here we show that optimal sensitivity is achievable by combiningresonance with phase sensitivity.

On-Chip Optical Transduction Scheme for Graphene Nano-Electro-Mechanical Systems in Silicon-Photonic Platform