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We report the fabrication of artificial unidimensional crystals exhibiting aneffective bulk second-order nonlinearity. The crystals are created by cyclingatomic layer deposition of three dielectric materials such that the resultingmetamaterial is non-centrosymmetric in the direction of the deposition.Characterization of the structures by second-harmonic generation Maker-fringemeasurements shows that the main component of their nonlinear susceptibilitytensor is about 5 pm/V which is comparable to well-established materials andmore than an order of magnitude greater than reported for a similar crystal[1-Alloatti et al, arXiv:1504.00101[cond-mat.mtrl- sci]]. Our demonstrationopens new possibilities for second-order nonlinear effects on CMOS-compatiblenanophotonic platforms.

Atomic layer deposited second order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry