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Repetitive wet thermal oxidations of a tapered oxide aperture in amicropillar structure are demonstrated. After each oxidation step the confinedoptical modes are analyzed at room temperature. Three regimes are identified.First, the optical confinement increases when the aperture oxidizes towards thecenter. Then, the cavity modes shift by more than 30 nm, when the taper startsto oxidize through the center, leading to a decrease in the optical pathlength. Finally, the resonance frequency levels o?f, when the aperture isoxidized all the way through the micropillar, but confined optical modes with ahigh quality factor remain. This repetitive oxidation technique thereforeenables precise control of the optical cavity volume or wavelength.

Fine tuning of micropillar cavity modes through repetitive oxidations