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We present a compact on-chip resonator enhanced silicon-MSM photodetector in$850$ $nm$ wavelength band for communication and lab-on-chip bio-sensingapplications. We report the highest responsivity of 0.81 A/W for a 5 $\mu m$long device. High responsivity is achieved by integrating the detector in asilicon nitride ring resonator. The resonance offers 100X responsivityimprovement over a single-pass photodetector due to cavity enhancement. We alsopresent a detailed study of the high-speed response of the cavity andsingle-pass detector. We report an electro-optic bandwidth of 7.5 GHz measuredusing a femtosecond optical excitation. To the best of our knowledge, we reportfor the first time silicon nitride resonator integrated Si-MSM detector inSiN-SOI platform.

Compact Ring Resonator Enhanced Silicon-MSM Photodetector in SiN-on-SOI Platform