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Photonic integrated circuit (PIC) phased arrays can be an enabling technologyfor a broad range of applications including free-space laser communications oncompact moving platforms. However, scaling PIC phased arrays to a large numberof array elements is limited by the large size and high power consumption ofindividual phase shifters used for beam steering. In this paper, we demonstratesilicon PIC phased array beam steering based on thermally tuned ultracompactmicroring resonator phase shifters with a radius of a few microns. Theseresonators integrated with micro-heaters are designed to be strongly coupled toan external waveguide, thereby providing a large and adjustable phase shiftwith a small residual amplitude modulation while consuming an average power of0.4 mW. We also introduce characterization techniques for the calibration ofresonator phase shifters in the phased array. With such compact phase shiftersand our calibration techniques, we demonstrate beam steering with a 1x8 PICphased array. The small size of these resonator phase shifters will enablelow-power and ultra-large scale PIC phased arrays for long distance lasercommunication systems.

Beam Steering with Ultracompact and Low-Power Silicon Resonator Phase Shifters