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We demonstrate a platform for phase and amplitude modulation in siliconnitride photonic integrated circuits via piezo-optomechanical coupling usingtightly mechanically coupled aluminum nitride actuators. The platform,fabricated in a CMOS foundry, enables scalable active photonic integratedcircuits for visible wavelengths, and the piezoelectric actuation functionswithout performance degradation down to cryogenic temperatures. As an exampleof the potential of the platform, we demonstrate a compact (~40 {\mu}mdiameter) silicon nitride ring resonator modulator operating at 780 nm withintrinsic quality factors in excess of 1.5 million, >10 dB change in extinctionratio with 2 V applied, a switching time less than 4 ns, and a switching energyof 0.5 pJ/bit. We characterize the exemplary device at room temperature and 7K. At 7 K, the device obtains a resistance of approximately 20 Teraohms,allowing it to operate with sub-picowatt electrical power dissipation. Wefurther demonstrate a Mach-Zehnder modulator constructed in the same platformwith piezoelectrically tunable phase shifting arms, with 750 ns switching timeconstant and 20 nW steady-state power dissipation at room temperature.

CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures