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We report on the realization of a solid-state-based vacuum ultravioletfrequency comb, using multi-harmonic generation in an external enhancementcavity. Optical conversions in such arrangements were so-far reported onlyusing gaseous media. We present a theory that allows selecting the most suitedsolid generation medium for specific target harmonics by adapting the bandgapof the material. Consequently, we experimentally use a thin AlN film grown on asapphire substrate to realize a compact frequency comb multi-harmonic source inthe DUV/VUV spectral range. Extending our earlier VUV source [Opt. Exp. 26,21900 (2018)] with the enhancement cavity, a sub-Watt level Ti:sapphirefemtosecond frequency comb is enhanced to 24 W stored average power, its 3rd,5th and 7th harmonics are generated, and the target harmonic power at 160 nmincreased by two orders of magnitude. The emerging non-linear effects in thesolid medium together with suitable intra-cavity dispersion management supportoptimal enhancement and stable locking. To demonstrate the spectroscopicability of the realized frequency comb, we report on the beat measurementbetween the 3rd harmonic beam and a 266 nm CW laser reaching about 1 MHzaccuracy.

All-solid-state VUV frequency comb at 160 nm using multi-harmonic generation in a non-linear femtosecond enhancement cavity