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The doubly periodic Si photonic crystal waveguide radiates the guided slow light into free space as an optical beam. The waveguide also functions as a beam steering device, in which the steering angle is changed substantially by a slight variation in the wavelength generated due to the large angular dispersion of the slow light. A similar function is obtained when the wavelength is fixed and the refractive index of the waveguide is changed. In this study, we tested two kinds of integrated heater structures and observed the beam steering using the thermo-optic effect. For a p-i-p doped waveguide, the heating current was made to flow directly across the waveguide and a beam steering range of 21° was obtained with a relatively low heating power and high-speed response of the order of 100 kHz, maintaining a narrow beam divergence of 0.1-0.3° and a 120 resolution points. We also performed a preliminary life test of the device but did not observe any severe degradation in the temperature variation of 80-430 K for the duration up to 20‒40 h. For a TiN heater device, we obtained the comparable beam steering characteristics, but the required heating power increased, and the response speed decreased drastically.

Thermally controlled Si photonic crystal slow light waveguide beam steering device