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We have fabricated and characterized 10,000 and 20,440 pixel MicrowaveKinetic Inductance Detector (MKID) arrays for the Dark-speckle Near-IREnergy-resolved Superconducting Spectrophotometer (DARKNESS) and the MKIDExoplanet Camera (MEC). These instruments are designed to sit behind adaptiveoptics systems with the goal of directly imaging exoplanets in a 800-1400 nmband. Previous large optical and near-IR MKID arrays were fabricated usingsubstoichiometric titanium nitride (TiN) on a silicon substrate. These arrays,however, suffered from severe non-uniformities in the TiN critical temperature,causing resonances to shift away from their designed values and lowering usabledetector yield. We have begun fabricating DARKNESS and MEC arrays usingplatinum silicide (PtSi) on sapphire instead of TiN. Not only do these arrayshave much higher uniformity than the TiN arrays, resulting in higher pixelyields, they have demonstrated better spectral resolution than TiN MKIDs ofsimilar design. PtSi MKIDs also do not display the hot pixel effects seen whenilluminating TiN on silicon MKIDs with photons with wavelengths shorter than 1um.

Large-format platinum silicide microwave kinetic inductance detectors for optical to near-IR astronomy