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We demonstrate a new scheme of spectromicroscopy in the extreme ultraviolet(EUV) spectral range, where the spectral response of the sample at differentwavelengths is imaged simultaneously. It is enabled by applying ptychographicalinformation multiplexing (PIM) to a tabletop EUV source based on high harmonicgeneration, where four spectrally narrow harmonics near 30 nm form a spectralcomb structure. Extending PIM from previously demonstrated visible wavelengthsto the EUV/X-ray wavelengths promises much higher spatial resolution and morepowerful spectral contrast mechanism, making PIM an attractivespectromicroscopy method in both the microscopy and the spectroscopy aspects.Besides the sample, the multicolor EUV beam is also imaged in situ, making ourmethod a powerful beam characterization technique. No hardware is used toseparate or narrow down the wavelengths, leading to efficient use of the EUVradiation.

Ptychographic hyperspectral spectromicroscopy with an extreme ultraviolet high harmonic comb