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An anisotropic model for the fabrication of annealed and reverse protonexchange waveguides in lithium niobate is presented. We characterized theanisotropic diffusion properties of proton exchange, annealing and reverseproton exchange in Z-cut and X-cut substrates using planar waveguides. Usingthis model we fabricated high quality channel waveguides with propagationlosses as low as 0.086 dB/cm and a coupling efficiency with optical fiber of90% at 1550 nm. The splitting ratio of a set of directional couplers ispredicted with an accuracy of +- 0.06.

Anisotropic model for the fabrication of Annealed and Reverse Proton Exchanged waveguides in congruent Lithium Niobate