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A new approach to experimentally investigate laser-induced periodic surface structures (LIPSSs) is introduced. Silicon was iteratively exposed to femtosecond laser pulses at λ = 800 nm and normal incidence in ambient air and at a fluence slightly over the single-pulse modification threshold. After each laser pulse, the topography of the surface was inspected by confocal microscopy. Subsequently, the sample was reproducibly repositioned in the laser setup, to be exposed to the next laser pulse. By this approach, the initiation and spatial evolution ("growth") of the LIPSSs were analyzed as function of the number of pulses applied. It was found that, after the first laser pulses, the ridges of the LIPSSs elevate, and valleys between the ridges deepen, by a few tens of nanometers relative to the initial surface. An electromagnetic model, discussed in earlier works, predicted that the spatial periodicity of LIPSSs decreases with the number of laser pulses applied. This implies material transport and reorganization of the irradiated material on the surface, due to each laser pulse. However, our experiments show a negligible shift of the lateral positions of the LIPSSs on the surface.

Pulse-analysis-pulse investigation of femtosecond laser-induced periodic surface structures on silicon in air