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Resistance thermometry provides a time-tested method for taking temperaturemeasurements. However, fundamental limits to resistance-based approaches hasproduced considerable interest in developing photonic temperature sensors toleverage advances in frequency metrology and to achieve greater mechanical andenvironmental stability. Here we show that silicon-based optical ring resonatordevices can resolve temperature differences of 1 mK using the traditionalwavelength scanning methodology. An even lower noise floor of 80 microkelvinfor measuring temperature difference is achieved in the side-of-fringe,constant power mode measurement.

Ultra-Sensitive Chip-Based Photonic Temperature Sensor Using Ring Resonator Structures