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The integrated optical circuit is a promising architecture for therealization of complex quantum optical states and information networks. Oneelement that is required for many of these applications is a high-efficiencyphoton detector capable of photon-number discrimination. We present anintegrated photonic system in the telecom band at 1550 nm based on UV-writtensilica-on-silicon waveguides and modified transition-edge sensors capable ofnumber resolution and over 40% efficiency. Exploiting the mode transmissionfailure of these devices, we multiplex three detectors in series to demonstratea combined 79% +/- 2% detection efficiency with a single pass, and 88% +/- 3%at the operating wavelength of an on-chip terminal reflection grating.Furthermore, our optical measurements clearly demonstrate no significantunexplained loss in this system due to scattering or reflections. Thiswaveguide and detector design therefore allows the placement ofnumber-resolving single-photon detectors of predictable efficiency at arbitrarylocations within a photonic circuit - a capability that offers great potentialfor many quantum optical applications.

High quantum-efficiency photon-number-resolving detector for photonic on-chip information processing