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We report the design, fabrication, and optical absorption measurement ofsilicon membranes patterned with partially aperiodic nanohole structures. Wedemonstrate excellent agreement between measurement and simulations. Weoptimize a partially aperiodic structure using a random walk algorithm anddemonstrate an experimental broadband absorption of 4.9 times that of aperiodic array.

Experimental demonstration of broadband absorption enhancement in partially aperiodic silicon nanohole structures