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We report on the fabrication of three-dimensional (3D) high-Q whisperinggallery microcavities on a fused silica chip by femtosecond lasermicrofabriction, enabled by the 3D nature of femtosecond laser direct writing.The processing mainly consists of formation of freestanding microdisks byfemtosecond laser direct writing and subsequent wet chemical etching. CO2 laserannealing is followed to smooth the microcavity surface. Microcavities witharbitrary tilting angle, lateral and vertical positioning are demonstrated, andthe quality (Q)-factor of a typical microcavity is measured to be up to1.07x10^6, which is currently limited by the low spatial resolution of motionstage used during the laser patterning and can be improved with motion stagesof higher resolutions.

On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing