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We report a Silicon nano-opto-mechanical device in which a nanomechanical doubly-clamped beam resonator is integrated to an optical microdisk cavity. Small flexural oscillations of the beam cause intensity modulations in the circulating optical field in the nearby microdisk cavity. By monitoring the corresponding fluctuations in the cavity transmission via a fiber-taper, one can detect these oscillations with a displacement sensitivity approaching 10 fm·Hz-1/2 at an input power level of 50 μW. Both the in-plane and out-of-plane fundamental flexural resonances of the beam can be read out by this approach - the latter being detectable due to broken planar symmetry in the system. Access to multiple mechanical modes of the same resonator may be useful in some applications and may enable interesting fundamental studies.

Monolithic integration of a nanomechanical resonator to an optical microdisk cavity