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Single 32.6 eV high harmonic pulses from a time-delay compensated monochromator were compressed down to 11 ± 3 fs by completely compensating for the pulse-front tilt. The photon flux was intensified up to 5.7×10(9) photons/s on target by implementing high harmonic generation under a phase matching condition in a hollow fiber used for increasing the interaction length. The output photon flux on target from the monochromator was comparable to that from a small synchrotron facility, while the pulse duration was more than three orders of magnitude shorter. This high harmonic beam line fulfills two requirements for time-resolved spectroscopy in extreme ultraviolet region, namely, ultrashort pulses and high photon flux.

Pulse compression of phase-matched high harmonic pulses from a time-delay compensated monochromator