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For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102 nm in the range of 1550 nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5 mW and is &gt; 2 mW over the entire tuning range. The sidemode suppression ratios are &gt; 45 dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (&lt; 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

Surface micromachined tunable 155 μm-VCSEL with 102 nm continuous single-mode tuning