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We examine the cavity resonance tuning of high-Q silicon photonic crystalheterostructures by localized laser-assisted thermal oxidation using a 532 nmcontinuous wave laser focused to a 2.5 mm radius spot-size. The total shift isconsistent with the parabolic rate law. A tuning range of up to 8.7 nm isachieved with ~ 30 mW laser powers. Over this tuning range, the cavity Qdecreases from 3.2\times10^5 to 1.2\times10^5. Numerical simulations model thetemperature distributions in the silicon photonic crystal membrane and thecavity resonance shift from oxidation.

Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation