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We report the antireflective property of thin film amorphous silicon (a-Si) solar cell structures based on graded refractive index structure together with theoretical analysis. Optimizations of the index profile are performed using the rigorous coupled-wave analysis method. The graded refractive index structure fabricated by oblique angle deposition suppresses optical reflection over a wide range of wavelength and incident angle, compared to the conventional structure. The average reflectance of thin film a-Si solar cell structure with the graded refractive index structure is suppressed by 54% at normal incidence due to the effective refractive index matching between ITO and a-Si, indicating a reasonable agreement with calculated results.

Antireflective property of thin film a-Si solar cell structures with graded refractive index structure