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A 32x32 Sb-based Geiger-mode (GM) avalanche photodiode array, operating at 2 μm with three-dimensional imaging capability, is presented. The array is interfaced with a ROIC (readout integrated circuit) in which each pixel can detect a photon and record the arrival time. The hybridized unit for the 1000-element focal plane array, when operated at 77K with 1 V overbias range, shows an average dark count rate of 1.5 kHz. Three-dimensional range images of objects were acquired.

Integrated array of 2-μm antimonide-based single-photon counting devices