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Conventional liquid microlens arrays are facing bottlenecks in controlling droplet size and shape, and limited aperture ratio. We report a new liquid/solvent approach to overcome these obstacles for making uniform droplet array and achieving approximately 90% aperture ratio. The droplets are very stable due to the pinning effect of the polymer walls and substrate surfaces. Using the fabricated droplet array, we demonstrate a tunable-focus microlens array based on dielectrophoretic effect. The microlens array exhibits a large dynamic range and fast response time (tens of milliseconds). Besides liquid microlens arrays, this fabrication method also opens a new door for making other tunable photonic devices.

A new method for fabricating high density and large aperture ratio liquid microlens array