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Optical forces in guided-wave nanostructures have recently been proposed asan effective means of mechanically actuating and tuning optical components. Inthis work, we study the properties of a photonic crystal optomechanical cavityconsisting of a pair of patterned silicon nitride nanobeams. Internal stressesin the stoichiometric silicon nitride thin-film are used to produce inter-beamslot-gaps ranging from 560 to 40nm. A general pump-probe measurement scheme isdescribed which determines, self-consistently, the contributions ofthermo-mechanical, thermo-optic, and radiation pressure effects. For deviceswith 40nm slot-gap, the optical gradient force is measured to be 134fN percavity photon for the strongly coupled symmetric cavity supermode, producing astatic cavity tuning greater than five times that of either the parasiticthermo-mechanical or thermo-optic effects.

Characterization of radiation pressure and thermal effects in a nanoscale optomechanical cavity