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We demonstrate high-performance nanowire superconducting single photondetectors (SSPDs) on ultrathin NbN films grown at a temperature compatible withmonolithic integration. NbN films ranging from 150nm to 3nm in thickness weredeposited by dc magnetron sputtering on MgO substrates at 400C. Thesuperconducting properties of NbN films were optimized studying the effects ofdeposition parameters on film properties. SSPDs were fabricated on high qualityNbN films of different thickness (7 to 3nm) deposited under optimal conditions.Electrical and optical characterizations were performed on the SSPDs. Thehighest QE value measured at 4.2K is 20% at 1300nm.

High performance NbN nanowire superconducting single photon detectors fabricated on MgO substrates