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We present quasi-analytical solutions (QANS) of hybrid platform (HP)comprising metallic grating (MG) and stacked-dielectric layers for terahertz(THz) radiation. The QANS are validated by finite difference time domainsimulation. It is found that the Wood anomalies induce the high-order spoofsurface plasmon resonances in the HP. The QANS are applied to optimize newperfect absorber for THz sensing of large-area thin film with ultrahigh figureof merit reaching fifth order of magnitude for the film thickness 0.0001p (p:MG period). The first-order Wood's anomaly of the insulator layer and theFabry-Perot in the slit's cavity account for the resonance of the perfectabsorber. The QANS and the new perfect absorber may lead to highly sensitiveand practical nano-film refractive index sensor for THz radiation.

Quasi-analytical solutions of hybrid platform and the optimization of highly sensitive thin-film sensors for terahertz radiation