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Surface-relief diffraction gratings and planar diffraction gratings directly written on nanoporous silicon layers using 514 nm continuous-wave lasers at very low power (less than 20 mW) were demonstrated. Diffraction-based biosensing application to detect arachidonic acid was experimentally demonstrated at incident light wavelength of 632.8 nm. A comparison in sensing applications was made between the two types of gratings to show the distinct advantage of the planar grating with selective functionalization. Laser-written planar gratings enable directly immobilizing biomolecules in the laser oxidized area of nanoporous silicon, resulting in a new patterned functionalization technique for biosensing applications. The functionalization technique can not only simplify the functionalization procedure in biosensing but also it has potential to increase the sensitivity of sensors by accurately defining grating patterns using the laser direct writing technique.

Laser-written nanoporous silicon diffraction gratings for biosensors