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We report the first experimental demonstration of a transmission-mode micromechanical beam steering device for use in standoff terahertz imaging and spectroscopy. The device was constructed by laminating laser-cut 96% alumina sheets to form two plates with interlocking rectangular gratings of 762 microm period and was characterized at 94 GHz in a free-space measurement setup with an automated elevation scan. Plate tilts as great as 6 degrees deflected the transmitted beam by 6 degrees for the transverse electric (TE) polarization and by 4 degrees for the transverse magnetic polarization. Finite-difference time-domain simulations of the TE performance were in good agreement with the measurements.

Measured and simulated performance of a ceramic micromechanical beam steering device at 94 GHz