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We present modeling and analysis of a hysteretic deformable mirror where thefacesheet interacts with a continuous layer of piezoelectric material that canbe actuated distributively by a matrix of electrodes through multiplexing.Moreover, a method for calculating the actuator influence functions isdescribed considering the particular arrangement of electrodes. The results arepresented in a semi-analytical model to describe the facesheet's deformationcaused by a high density array of actuators, and validated in a simulation. Theproposed modeling of an interconnection layout of electrodes is used todetermine the optimal pressures the actuators have to exert for achieving adesired surface deformation.

Influence functions for a hysteretic deformable mirror with a high density 2D array of actuators