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Zirconium oxide (ZrO2) abrasives were proposed as the alternative abrasives of cerium oxide (CeO2) abrasives to reduce the use of CeO2 abrasives in glass polishing. In polishing, a larger number of effective abrasives between work and polishing pad can be realized to the good polishing performances during processing. Two methods have developed to increase the number of effective abrasives on the polishing pad. As the first method to increase the effective abrasives, we used the cohering phenomenon at the isoelectric point of ZrO2 abrasives. The cohered ZrO2 abrasives were obtained the better surface roughness from 1.12nmRa to 0.86nmRa in a shorter time (10min.) compared with CeO2 abrasives. And the next method to increase the number of effective abrasives was adding some additives such as NiO, WO3, and CuO to the ZrO2 abrasives. The role of added additives was to limit the behavior of the ZrO2 abrasives on the pad, and this could increase the effective abrasives to improve the stagnation state of ZrO2 abrasives between the work and polishing pad. The removal rate of work using CuO additives was 25% higher than that of ZrO2 abrasives.

Development of Alternative Abrasives of Cerium Oxide for Glass Polishing