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The present study proposes a new fine-positioning mechanism with piezoelectric actuators and a fine-positioning method for this mechanism. We realized a long stroke path and an ultraprecision positioning simultaneously with a single apparatus. A positioning apparatus with a fine-positioning mechanism attached to the displacement extension mechanism was developed. Actuators were used sequentially for the extension mechanism and the reduction mechanism. Fine positioning is obtained with cooperative positioning that is performed by combining extended displacement positioning and reduced displacement positioning. As a fundamental experiment, the positioning characteristics of extended displacement positioning and reduced displacement positioning were examined individually. A value of 4.63 times the displacement magnification in extended displacement positioning and a value of 0.19 times the displacement magnification in reduced displacement positioning were obtained in comparison with displacement of an actuator unit alone. Cooperative positioning using displacement feedback with PI control was then examined. As a result, even though the stroke was extended, high-resolution positioning was realized simultaneously. In addition, under the condition that the overshoot is not allowed, shortening at the settling time in comparison with only the extended displacement positioning was confirmed.

Cooperated Positioning Control for Ultraprecision Positioning in Extended Stroke Path