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Most heat treatment equipments that control a large area to uniform temperature are divided into two or more zones, and the temperature control of each zone is carried out individually. However, for two or more zones with time delay, nonlinearity, uncertainty, and unknown disturbance, it is difficult to control each zone to an uniform temperature. Therefore, we propose a master-slaves control that can make those temperature loci in agreement with high precision. The proposed method is designed based on model reference sliding-mode control (MRSMC). Experimental results illustrate the effectiveness of the proposed method with applying to the multi-zone cooling plate for chilling a 300 [mm] wafer. By the proposed method, the temperature range across the wafer in cooling process is reduced within ± 0.1 [°C].

Master-Slaves Control Based on Model Reference Sliding-Mode Control (Temperature Locus Follow-Up Control of Multi-Zone Cooling Plate)