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A flow meter whose flow rate is of the order of 10-9l/s is developed. The previous meter (4) having the same measuring principle has a lower measuring limit of 10-7l/s due to the heat conduction effect In this study, a new meter having a reduced heat conduction was designed and it enables us to measure the flow rate as small as 2.2×10-9l/s. Numerical simulation for this meter revealed that there are two different heat conduction effects on the flow meter performance, i.e., (i) the conduction through the tested fluid and (ii) the conduction through the channel wall of the meter. The latter has a serious effect on the flow meter performance at low flow rate. It has been shown that thermal diffusivity of the wall material smaller than that of tested fluid realizes the lower measurable flow rate significantly.

Development of Micro Flow Meter of the order of nl/s Flow Rate