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In order to analyze the flow field in the turbo-molecular pump using the Direct-Simulation-Monte-Carlo method, the number of simulating particle becomes very large, because of the large difference of the number density in the pump. The method of changing the weight of particle to the real molecule is remarkably effective to reduce the number of particle. Some former studies shows that this method is not good, but in the flow of pump, it works very well. Here two methods of deleting particles while changing the weight are compared. The 'counting' method is much robuster in the simple test. Also the result of simulation of the 2D flow in the turbo molecular pump using the 'weight-change' technique agrees almost completely with that of ordinary simulation. The flow field in the pump which has some practical number of stages (14 stages of rotors and 14 stages of stators) is calculated within the small computing load.

Numerical Simulation of Two Dimensional Flow in the Turbo Molecular Pump (2nd Report, A Method to Keep the Accuracy in Multi-stage Pump)