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A submicroscale flow sensor has been developed that consists of a suspended hot film and carbon nanotube (CNT) fins. Flow measurement experiments, together with a theoretical model, revealed the advantages of the use of CNT fins. The suspended metal film reduces heat loss and the CNT fins enhance the heat transfer to the fluid flow. Herein, the working principle of the CNT fins is presented in detail, together with a description of the micro electro mechanical systems (MEMS) / nano electro mechanical systems (NEMS) techniques used to fabricate the sensor. The CNTs were deposited by a manipulation method that is based on dielectrophoresis.

Submicroscale Flow Sensor Employing Suspended Hot Film with Carbon Nanotube Fins