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Biohybrid systems integrating biological motors have been studied for miniature and multifunctional microsystems. The objective of this study is to develop a microvalve composed of Vorticella actuator and a movable component. A movable part was patterned on a water-soluble dextran sacrificial layer and assembled in a microfluidic device. Cells of Vorticella capturing magnetic particles were placed at target position by magnetic force.

20am2-A6 Development of Microvalve with Adjustable Flow Resistance by Integrating Vorticella and Movable Components