J161033 Examination of Structure and Fabrication Process of Vertically Movable Macbee : Microactuator powered by Collaboration of Electrostatic and Elastic energies/forces | Zendy

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J161033 Examination of Structure and Fabrication Process of Vertically Movable Macbee : Microactuator powered by Collaboration of Electrostatic and Elastic energies/forces

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