723 Nano-machining of the grating disk for the purpose of high-resolution and micro rotary encoder development : Comparison of the grating disk of 1 mm and 250 μm in diameter | Zendy

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723 Nano-machining of the grating disk for the purpose of high-resolution and micro rotary encoder development : Comparison of the grating disk of 1 mm and 250 μm in diameter

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