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This paper describes a seismic isolation system for monocrystal pullers. In the monocrystal puller, a monocrystal is suspended by a wire through an extremely narrow neck, and it grows longitudinally as it is withdrawn gradually from the molten material. The neck is easily broken due to collision between the monocrystal and the wall of the puller, even during even weak earthquakes. In this study, an active isolation system using linear motors has been developed because the linear motors are the most suitable actuators for this purpose. Through shake table tests, it was shown that the active isolation system could effectively reduce the displacement of the monocrystal model.

246 Seismic Isolation System with Convertible Active and Passive Modes Using Linear Motors for Monocrystal Pullers