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©2013 The Japan Society of Mechanical Engineers 前田拓巳 ∗1, 星野洋平 ∗2, 吉田大輔 ∗1, 小林幸徳 ∗3, 江丸貴紀 ∗2 Force Redistribution Method for Compensating Actuator-Breakdown of Vibration Isolation Tables Supported with a Redundant Number of Pneumatic Actuators Takumi MAEDA∗1, Yohei HOSHINO, Daisuke YOSHIDA, Yukinori KOBAYASHI and Takanori EMARU ∗1 Graduate School of Engineering, Hokkaido University, N13W8, Sapporo, Hokkaido, 060-8628, Japan

Force Redistribution Method for Compensating Actuator-Breakdown of Vibration-Isolation Tables Supported with a Redundant Number of Pneumatic Actuators