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In this paper a pneumatic positioning stage which is mounted on the base plate and supported by the coil-type spring isolators is considered. The stage is moved by the driving force during positioning and the reaction force causes vibration of the base plate with its natural frequency, which degrades the performance of the positioning. To reduce the effect of the reaction force and improve the positioning time, the base plate jerk feedback is proposed. An external force is used to realize the principle of the base plate jerk feedback based on the theoretical background. The experimental results confirm that the working principle of the base plate jerk feedback obeys the theoretical concepts. The feedback is then employed for the real positioning. Based on the experimental results including repeatability, the effect of the reaction force was considerably reduced and the settling time of the response was improved, after employing the base plate jerk feedback with approximate optimal gain.

Realization and Application of the Base Plate Jerk Feedback in a Pneumatic Positioning Stage