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In this study, a cooling device using supersonic flow inside a micro-channel has been evaluated. To confirm the density measurement and temperature estimation of the supersonic air flow inside a micro-channel, a preliminary experiment using an interferometer was conducted. A single micro-channel was fabricated in a small Si plate, which was made using Micro-Electro-Mechanical System (MEMS) technology. The channel size was approximately 200 μm in width, 500 μm in depth, and 6000 μm in length. The Deep Reactive-Ion-Etching (Deep-RIE) method was used for fabricating of the channel. A fabricated Si plate was sandwiched between glass plates. The density field of the supersonic/subsonic air flow near inlet and outlet were recorded as phase-shifted data using a phase-shifting interferometer. The pressure at the inlet, outlet, and inside the channel were set to 0.7 and 0.1 MPaA, respectively. The density field of the micro-channel air flow was evaluated despite the fringe number being less than one. This experimental result was compared with numerical simulation. From the comparison, the measured density field exhibited a good agreement with the numerical results, and the temperature field could be estimated. It was confirmed that this method was valid for the density measurement and the sophisticated visualization of the supersonic air flow inside a micro-channel.

Preliminary experiment of supersonic micro-channel gas flow visualization by using Interferometer