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The single-stage TMP is investigated by the direct simulation Monte Carlo (DSMC) method with a three dimensional analysis in a rotating reference frame. The generalized soft sphere (GSS) model and the modified Larsen-Borgnakke model are applied to simulate the intermolecular collisions. The pumping performances of TMP application with different gases on the same blade speed ratio are compared and analyzed in detail. The influence of clearance between the housing and rotor walls on them is predicted and analyzed. The performances and flow field characteristics of TMP pumping gas mixture are simulated, and the results for pumping performances are compared with the results by linear combination of each single gas. The present DSMC calculation results agree with the experimental data better than the former DSMC calculation with VSS model and general Larsen-Borgnakke model in the transitional flow.

A Three-Dimensional DSMC Simulation of Single-Stage Turbomolecular Pump Adopting Accurate Intermolecular Collisions Models