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A fabrication process of a thermal element, which would be used as a contact sensor in the concept of defect detection on smooth surfaces, has been designed. The thermal element, which consists of thin-film resistance, would be used to capture small amount of frictional heat generated at the contact with nanometer-order defects. Therefore, feasibility of the designed process has been verified by developing a first prototype of the thermal element, while considering its thermal sensitivity. Experimental results revealed that the fabricated thermal element is functional for detecting small amount of heat on the order of several-ten microwatts.

Design of fabrication process of a thermal contact sensor for surface defect inspection