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Akira KAKUTA, Yuji FURUKAWA and Nobuyuki MORONUKI **Graduate School of System Design, Tokyo Metropolitan University, 6-6, Asahigaoka, Hino-shi, TOKYO, 191-0065, JAPAN E-mail: kakuta-akira@c.metro-u.ac.jp ***Graduate School of Technology Management, Tokyo University of Agriculture & Technology 2-24-16, Naka-cho, Koganei-shi, TOKYO, 184-0012, JAPAN ****Graduate School of System Design, Tokyo Metropolitan University, 6-6, Asahigaoka, Hino-shi, TOKYO, 191-0065, JAPAN

The Effect of Substrate Crystal Orientations on Surface Properties of SiC Thin Layer Grown by MBE