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This paper presents the dynamic analysis and control system design of a compliant stage with reconfigurable dynamic characteristics, consist of a notch-based structure and a mechanical amplifier. Generally, compliant stages are usually fabricated of metallic structures. Such an approach could yield excellent performance in many applications with simple feedback controls incorporated. However, the system dynamic cannot be changed once the geometry of the stages is designed. In this work, we propose a dynamic characteristics reconfigured approach by incorporating polydimethylsiloxane (PDMS) layer to modify the dynamic characteristics of compliant structures. In order to implement the approach, a compliant stage is designed and realized. Essential performance and dynamic tests are conducted to examine the functional performances and dynamic characteristics of both the original and PDMS-modified stages. The dynamic testing results indicate that the PDMS materials can significantly increase the stiffness and damping coefficient of the stage for 45% and 6.7%, respectively. Finally, for assessing the possible advantage in precision control by using this structural reconfiguration approach, controller systems are designed based on loop transmission shaping and positive acceleration, velocity and position feedback methods. The experimental results demonstrate that settling time is indeed improved from 55.3ms to 36.2ms after the dynamic characteristics are adjusted.

Design and Control of a Compliant Stage with Reconfigurable Dynamic Characteristics by Incorporated Rubber Shear Damper